求翻译：备工艺室采用等隔舱腔体设计，可实现泵位与阴极位之间互换，包含36个舱位，11套阴极（3套平面阴极、8套旋转阴极）是什么意思？

Preparing process chamber bulkhead cavity design can be achieved between the pump and cathode swap consists of 36 accommodation, 11 sets of cathode (3 sets of flat cathode, eight sets of rotating cathode)

A craft room in the compartment, such as cavity design, you can pump with interchangeable between cathode place, contains 36 spaces, 11 CC (3 sets, 8 flat cathode sleeve cathode)

Prepares the craft room to use and so on the compartment housing designs, may realize between the pump position and the negative pole position exchanges, contains 36 seats on a ship, 11 sets of negative poles (3 set of plane negative poles, 8 set of revolving negative poles)

Craft room compartment cavity design, swap between the pump and the cathode can be realized, contain 36 spaces, 11 cathode (3 planes, 8 sets of rotating cathode cathode)

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